sheath voltage meaning in Chinese

覆皮电压

The results of simulations are : i ) energies of the incident ions to the target are determined mainly by the voltage across the cathode sheath , with a majority of ions " energy vary around the sheath voltage ; ions nearly normally bombard the target ; ions mainly locate above the sputtering holes because of the influence of the magnetic field , and the incident ions mainly come from the region ; the ions undergo several collisions during transportation , but that do n ' t matter much
主要模拟结果有： ? )入射离子到达靶面时的能量主要受到了射频辉光放电中阴极壳层西北工业大学硕士学位论文李阳平电压的影响，大部分离子的入射能量在阴极壳层电压值附近，离子溅射时接近于垂直入射;射频辉光放电受到阴极磁场的影响，等离子体中的离子主要集中在靶面溅射坑的上方，且入射离子主要来自这个区域;入射离子在输运过程中和背景气体分子有少量的碰撞，但影响不太大。